Laser Ultrasound Measurement of Diaphragm Thickness, Young's Modulus and Poisson's Ratio in an MEMS Device (2017)
Attributed to:
Metrology for precision and additive manufacturing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jstqe.2016.2635518
Publication URI: http://dx.doi.org/10.1109/jstqe.2016.2635518
Type: Journal Article/Review
Parent Publication: IEEE Journal of Selected Topics in Quantum Electronics
Issue: 2