Laser Ultrasound Measurement of Diaphragm Thickness, Young's Modulus and Poisson's Ratio in an MEMS Device (2017)

First Author: McKee C
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jstqe.2016.2635518

Publication URI: http://dx.doi.org/10.1109/jstqe.2016.2635518

Type: Journal Article/Review

Parent Publication: IEEE Journal of Selected Topics in Quantum Electronics

Issue: 2