On tilt and curvature dependent errors and the calibration of coherence scanning interferometry. (2017)
Attributed to:
Metrology for precision and additive manufacturing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.25.003297
PubMed Identifier: 28241545
Publication URI: http://europepmc.org/abstract/MED/28241545
Type: Journal Article/Review
Volume: 25
Parent Publication: Optics express
Issue: 4
ISSN: 1094-4087