On tilt and curvature dependent errors and the calibration of coherence scanning interferometry. (2017)

First Author: Su R
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.25.003297

PubMed Identifier: 28241545

Publication URI: http://europepmc.org/abstract/MED/28241545

Type: Journal Article/Review

Volume: 25

Parent Publication: Optics express

Issue: 4

ISSN: 1094-4087