Implantation and Diffusion of Silicon Marker Layers in In0.53Ga0.47As (2016)

First Author: Aldridge H

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s11664-016-4616-0

Publication URI: http://dx.doi.org/10.1007/s11664-016-4616-0

Type: Journal Article/Review

Parent Publication: Journal of Electronic Materials

Issue: 8