The role of nitrogen doping in ALD Ta 2 O 5 and its influence on multilevel cell switching in RRAM (2017)

First Author: Sedghi N

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4978033

Publication URI: http://dx.doi.org/10.1063/1.4978033

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 10