Burg algorithm for enhancing measurement performance in wavelength scanning interferometry (2016)

First Author: Woodcock R
Attributed to:  EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2051-672x/4/2/024003

Publication URI: http://dx.doi.org/10.1088/2051-672x/4/2/024003

Type: Journal Article/Review

Parent Publication: Surface Topography: Metrology and Properties

Issue: 2