The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas (2017)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6587/59/2/024004
Publication URI: http://dx.doi.org/10.1088/1361-6587/59/2/024004
Type: Journal Article/Review
Parent Publication: Plasma Physics and Controlled Fusion
Issue: 2