Design, fabrication and testing of a hybrid micro-motion XY stage driven by voice coil actuators (2016)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/icsae.2016.7810179
Publication URI: http://dx.doi.org/10.1109/icsae.2016.7810179
Type: Conference/Paper/Proceeding/Abstract