Large area high-speed metrology SPM system. (2015)

First Author: Klapetek P

Attributed to: High-Speed AFM funded by NERC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/26/6/065501

PubMed Identifier: 25597347

Publication URI: http://europepmc.org/abstract/MED/25597347

Type: Journal Article/Review

Volume: 26

Parent Publication: Nanotechnology

Issue: 6

ISSN: 0957-4484