A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology (2016)
Attributed to:
The Centre for Advanced Tribology at Southampton
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4958842
Publication URI: http://dx.doi.org/10.1063/1.4958842
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 2