Orientation imaging of macro-sized polysilicon grains on wafers using spatially resolved acoustic spectroscopy (2017)

First Author: Patel R
Attributed to:  Nano-agents for read / write microscopy and nano-macro bridging funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.scriptamat.2017.07.003

Publication URI: http://dx.doi.org/10.1016/j.scriptamat.2017.07.003

Type: Journal Article/Review

Parent Publication: Scripta Materialia