Surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry. (2017)
Attributed to:
Future Advanced Metrology Hub
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.25.024148
PubMed Identifier: 29041360
Publication URI: http://europepmc.org/abstract/MED/29041360
Type: Journal Article/Review
Volume: 25
Parent Publication: Optics express
Issue: 20
ISSN: 1094-4087