Thermal compensation using the hybrid metrology approach compared to traditional scaling (2017)
Attributed to:
The Light Controlled Factory
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1177/0954405417733766
Publication URI: http://dx.doi.org/10.1177/0954405417733766
Type: Journal Article/Review
Parent Publication: Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Issue: 13