Reconfigurable phase-change photomask for grayscale photolithography (2017)
Attributed to:
NANOSCOPE: looking inside a living cell with nanoscale resolution
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4983198
Publication URI: http://dx.doi.org/10.1063/1.4983198
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 20
ISSN: 0003-6951