Film bulk acoustic resonator pressure sensor with self temperature reference (2012)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/12/125005
Publication URI: http://dx.doi.org/10.1088/0960-1317/22/12/125005
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 12
ISSN: 0960-1317