Laser Annealing of Low Temperature Deposited Silicon Waveguides (2017)

First Author: Franz Y
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/cleo_si.2017.sm3k.4

Publication URI: http://dx.doi.org/10.1364/cleo_si.2017.sm3k.4

Type: Conference/Paper/Proceeding/Abstract