Elucidation of ALD MgZnO deposition processes using low energy ion scattering (2018)

First Author: Werner M
Attributed to:  An in-situ LEIS facility for atomic-scale assembly manufacturing research funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.5015958

Publication URI: http://dx.doi.org/10.1116/1.5015958

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 2