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Laser drilling of microholes in single crystal silicon using continuous wave (CW) 1070 nm fiber lasers with millisecond pulse widths (2018)

First Author: Maclean, JO

Attributed to: UK Quantum Technology Hub for Sensors and Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Publication URI: http://www.oldcitypublishing.com/journals/lie-home/lie-issue-contents/lie-volume-39-number-1-2-2018/lie-39-1-2-p-53-65/

Type: Journal Article/Review

Volume: 39

Parent Publication: Lasers in Engineering

Issue: 1-2