Computer simulation of the sheath and the adjacent plasma in the presence of a plasma source (2017)

First Author: Shustin E

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.vacuum.2016.10.002

Publication URI: http://dx.doi.org/10.1016/j.vacuum.2016.10.002

Type: Journal Article/Review

Parent Publication: Vacuum