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Room temperature thermally evaporated thin Au film on Si suitable for application of thiol self-assembled monolayers in micro/nano-electro-mechanical-systems sensors (2017)

First Author: Mahmoodi N

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.4990026

Publication URI: http://dx.doi.org/10.1116/1.4990026

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 4