Modeling and analysis of sub-aperture tool influence functions for polishing curved surfaces (2018)

First Author: Wan S

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.precisioneng.2017.09.013

Publication URI: http://dx.doi.org/10.1016/j.precisioneng.2017.09.013

Type: Journal Article/Review

Parent Publication: Precision Engineering