Combining single source chemical vapour deposition precursors to explore the phase space of titanium oxynitride thin films. (2018)
Attributed to:
University of Southampton - Equipment Account
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/c7dt04694d
PubMed Identifier: 29441374
Publication URI: http://europepmc.org/abstract/MED/29441374
Type: Journal Article/Review
Volume: 47
Parent Publication: Dalton transactions (Cambridge, England : 2003)
Issue: 31
ISSN: 1477-9226