Combining single source chemical vapour deposition precursors to explore the phase space of titanium oxynitride thin films. (2018)

First Author: Rees K
Attributed to:  University of Southampton - Equipment Account funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/c7dt04694d

PubMed Identifier: 29441374

Publication URI: http://europepmc.org/abstract/MED/29441374

Type: Journal Article/Review

Volume: 47

Parent Publication: Dalton transactions (Cambridge, England : 2003)

Issue: 31

ISSN: 1477-9226