Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials (2017)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4979855
Publication URI: http://dx.doi.org/10.1063/1.4979855
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 14
ISSN: 0021-8979