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Numerical study of the influence of surface reaction probabilities on reactive species in an rf atmospheric pressure plasma containing humidity (2018)

First Author: Schröter S

Attributed to: Metrology concepts for a new generation of plasma manufacturing with atom-scale precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6587/aa8fe9

Publication URI: http://dx.doi.org/10.1088/1361-6587/aa8fe9

Type: Journal Article/Review

Parent Publication: Plasma Physics and Controlled Fusion

Issue: 1

ISSN: 0741-3335