Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases (2018)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6587/aa8378
Publication URI: http://dx.doi.org/10.1088/1361-6587/aa8378
Type: Journal Article/Review
Parent Publication: Plasma Physics and Controlled Fusion
Issue: 1
ISSN: 0741-3335