Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers (2007)

First Author: Dauchy F

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s10832-007-9317-x

Publication URI: http://dx.doi.org/10.1007/s10832-007-9317-x

Type: Journal Article/Review

Parent Publication: Journal of Electroceramics

Issue: 4

ISSN: 13853449 15738663