Noise evaluation of a point autofocus surface topography measuring instrument (2018)

First Author: Maculotti G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6501/aab528

Publication URI: http://dx.doi.org/10.1088/1361-6501/aab528

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 6