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Fabrication of microfluidic cavities using Si-to-glass anodic bonding. (2018)

First Author: Zhelev N

Attributed to: Topological superfluids under engineered nanofluidic confinement: new order parameters and exotic excitations funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.5031837

PubMed Identifier: 30068088

Publication URI: http://europepmc.org/abstract/MED/30068088

Type: Journal Article/Review

Volume: 89

Parent Publication: The Review of scientific instruments

Issue: 7

ISSN: 0034-6748