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Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices (2018)

First Author: Chen B

Attributed to: CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.26.024953

PubMed Identifier: 30469603

Publication URI: http://europepmc.org/abstract/MED/30469603

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 19

ISSN: 1094-4087