Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices. (2018)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.26.024953
PubMed Identifier: 30469603
Publication URI: http://europepmc.org/abstract/MED/30469603
Type: Journal Article/Review
Volume: 26
Parent Publication: Optics express
Issue: 19
ISSN: 1094-4087