Spatially Resolved Optical Emission and Modeling Studies of Microwave-Activated Hydrogen Plasmas Operating under Conditions Relevant for Diamond Chemical Vapor Deposition. (2018)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.jpca.8b07491
PubMed Identifier: 30252472
Publication URI: http://europepmc.org/abstract/MED/30252472
Type: Journal Article/Review
Volume: 122
Parent Publication: The journal of physical chemistry. A
Issue: 42
ISSN: 1089-5639