Iterative Identification and Control Using Non-normalized Coprime Factors With Application in Wafer Stage Motion Control (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tcst.2018.2877680

Publication URI: http://dx.doi.org/10.1109/tcst.2018.2877680

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Control Systems Technology

Issue: 2