Ultraprecision machining of microlens arrays with integrated on-machine surface metrology. (2019)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.27.000212
PubMed Identifier: 30645369
Publication URI: http://europepmc.org/abstract/MED/30645369
Type: Journal Article/Review
Volume: 27
Parent Publication: Optics express
Issue: 1
ISSN: 1094-4087