Fabrication and modal characterisation of large-area polymer membranes for acoustic micro-electromechanical systems devices (2018)

First Author: Camellini L

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1049/mnl.2018.0089

Publication URI: http://dx.doi.org/10.1049/mnl.2018.0089

Type: Journal Article/Review

Parent Publication: Micro & Nano Letters

Issue: 7