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Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges (2017)

First Author: Mitrakos V

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/mi8020041

Publication URI: http://dx.doi.org/10.3390/mi8020041

Type: Journal Article/Review

Parent Publication: Micromachines

Issue: 2