A novel hyper-crossing tool path generation algorithm for sub-aperture polishing (2018)

First Author: Li H

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2312827

Publication URI: http://dx.doi.org/10.1117/12.2312827

Type: Conference/Paper/Proceeding/Abstract