Fabrication of silicon slot waveguides with 10nm wide oxide slot (2017)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/group4.2017.8082184
Publication URI: http://dx.doi.org/10.1109/group4.2017.8082184
Type: Conference/Paper/Proceeding/Abstract