Ion implantation in silicon for photonic device trimming (2017)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/cleopr.2017.8118916
Publication URI: http://dx.doi.org/10.1109/cleopr.2017.8118916
Type: Conference/Paper/Proceeding/Abstract