Hot-wire CVD a-Si:H for low loss silicon photonic waveguides (2018)

First Author: Oo S
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/cleopr.2018.w1f.1

Publication URI: http://dx.doi.org/10.1364/cleopr.2018.w1f.1

Type: Conference/Paper/Proceeding/Abstract