Hot wire chemical vapor deposition for silicon photonics: An emerging industrial application opportunity (2019)

First Author: Tarazona A

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2019.02.048

Publication URI: http://dx.doi.org/10.1016/j.tsf.2019.02.048

Type: Journal Article/Review

Parent Publication: Thin Solid Films