Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence (2018)
Attributed to:
MATERIALS CHEMISTRY HIGH END COMPUTING CONSORTIUM
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.microrel.2017.12.021
Publication URI: http://dx.doi.org/10.1016/j.microrel.2017.12.021
Type: Journal Article/Review
Parent Publication: Microelectronics Reliability