99.992% 28Si CVD-grown epilayer on 300 mm substrates for large scale integration of silicon spin qubits (2019)

First Author: Mazzocchi V

Attributed to: Astronomy at the Open University 2017-2020 funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.jcrysgro.2018.12.010

Publication URI: http://dx.doi.org/10.1016/j.jcrysgro.2018.12.010

Type: Journal Article/Review

Parent Publication: Journal of Crystal Growth