An in-situ TEM study of the effects of 6 keV He ion irradiation on Si and SiO 2 (2012)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1742-6596/371/1/012045
Publication URI: http://dx.doi.org/10.1088/1742-6596/371/1/012045
Type: Journal Article/Review
Parent Publication: Journal of Physics: Conference Series