Solid-phase epitaxial regrowth of amorphous silicon containing helium bubbles (2008)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.3009383
Publication URI: http://dx.doi.org/10.1063/1.3009383
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 9