Rapid and damage-free outgassing of implanted helium from amorphous silicon oxycarbide. (2018)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41598-018-23426-y

PubMed Identifier: 29568069

Publication URI: http://europepmc.org/abstract/MED/29568069

Type: Journal Article/Review

Volume: 8

Parent Publication: Scientific reports

Issue: 1

ISSN: 2045-2322