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The influence of tilt on surface roughness measurement using the focus variation microscope (2015)

First Author: Coupland J.

Attributed to: Synthetic aperture interferometry: High-resolution optical measurement over an exceptionally large field of view funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Type: Other

Parent Publication: Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015