The influence of tilt on surface roughness measurement using the focus variation microscope (2015)
Attributed to:
Synthetic aperture interferometry: High-resolution optical measurement over an exceptionally large field of view
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Type: Other
Parent Publication: Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015