Laser drilling of micro-holes in single crystal silicon, indium phosphide and indium antimonide using a continuous wave (CW) 1070 nm fibre laser with millisecond pulse widths (2018)

First Author: Maclean JO
Attributed to:  UK Quantum Technology Hub for Sensors and Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Publication URI: https://www.sciencedirect.com/science/article/pii/S2212827118309454

Type: Journal Article/Review

Volume: 74

Parent Publication: Procedia CIRP

Issue: 10.1016/j.procir.2018.08.158