Hydrogen Related Defects in Float Zone Silicon Investigated Using a Shielded Hydrogen Plasma (2018)

First Author: Bourret-Sicotte G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/pvsc.2018.8547713

Publication URI: http://dx.doi.org/10.1109/pvsc.2018.8547713

Type: Conference/Paper/Proceeding/Abstract